System & Equipment
 Gas Cabinets
 Purifier
 Scrubber
 Pressure Swing
  Adsorption System
 NanochemŽ




Taiyo Nippon Sanso Corporation, is the world leader in purification applications.

By exploiting its core competencies, TNSC develops ultra pure gas
handling equipment for the LCD, semiconductor and other high technology markets, supplying gas purifiers for virtually all bulk and
specialty gas applications.

 

Inert Gases
Gas
N2
Ar
He
Model
SPNP-1000 (Standard Type)
SPNP-100C (CH4 removal)
SPNP-1100 (Small flow. low cost)
SPAP-1000 (Standard Type)
SPAP-1100 (Small flow, low cost)
SPRP-1000 (Standard Type)
SPRP-1100 (Small flow, low cost)
Capacity (Nm3/hr)
3 - 2000
100 - 2000
3 - 6
3 - 100
3 - 6
3 - 100
3 - 6

Rare Gases

Gas
Ar
He
Model
SPAG-1000 (Standard Type)
SPAG-100H (H2 removal)
SPRG-1000 (Standard Type)
SPRG-100H (H2 removal)
Capacity (Nm3/hr)
1- 30
0.3 - 30
1- 30
0.3 - 30

Oxygen

Gas
O2
Model
SPOP-1000 (Standard Type)
SPOP-1100 (Small flow, low cost)
Capacity (Nm3/hr)
2 - 100
2 - 3

Hydrogen

Gas
H2
H2
(Cryogenic type)
Model
SPHP-1000 (Standard Type)
SPHP-1100 (Small flow, low cost)
SPHL-1000 (Standard Type)
Capacity (Nm3/hr)
3 - 50
3 - 6
10 - 500

Ammonia

Gas
NH3
Model
SPMP-1000 (Standard Type)
Capacity (Nm3/hr)
1 - 10




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